ZMI-4104C Zygo Ultra high precision measurement module

Zygo ZMI-4104C Laser Interferometer

Precision Metrology for Ultra-High-Accuracy Measurement

1. Technical Specifications

Measurement Performance

• Measurement Range:
  Configurable for multi-meter linear displacement (exact range depends on optics setup).
• Resolution:
  Sub-nanometer resolution (<0.1 nm) for ultra-precise displacement tracking.
• Accuracy:
  ±0.1 ppm (parts per million) with real-time environmental compensation (temperature, pressure, humidity).
• Sampling Rate:
  High-speed data acquisition up to MHz-level frequencies, enabling dynamic motion analysis.

Optical System

• Laser Source:
  Stabilized helium-neon (HeNe) laser at 633 nm wavelength, ensuring low noise and long-term stability.
• Interferometer Configurations:
  Supports linear, angular, and straightness measurements; compatible with multi-axis (X/Y/Z/θ) synchronization.

Environmental Compensation

• Integrated Sensors:
  Built-in temperature, pressure, and humidity sensors for real-time refractive index correction.
• Vibration Immunity:
  Phase-locked loop (PLL) technology to minimize errors caused by mechanical vibrations.

Interfaces & Connectivity

• Output Options:
  Analog (differential analog signals) and digital (USB, Ethernet) interfaces for integration with PLCs, CNCs, or DAQ systems.
• Software Compatibility:
  Zygo MetroPro® or Mx™ Software Suite for real-time data visualization, analysis, and automated control.

2. Key Functionalities

Dynamic Displacement Measurement

• Real-time monitoring of position, velocity, and acceleration in high-speed systems (e.g., semiconductor lithography stages).

Multi-Axis Synchronization

• Simultaneous measurement of 3D linear axes and rotational axes for complex motion platform calibration.

Surface Profiling (Optional)

• Upgradeable to white-light interferometry (WLI) or phase-shifting interferometry (PSI) for non-contact surface roughness and flatness analysis (resolution down to 0.1 nm RMS).

Industrial Automation Integration

• API support and compatibility with EtherCAT, PROFINET, and other industrial protocols for seamless integration into automated production lines.

3. Applications

Semiconductor Manufacturing

• Precision alignment of lithography wafer stages.
• Metrology for ASML or Nikon photolithography tools.

Optics & Photonics

• Surface figure testing of aspheric lenses, mirrors, and freeform optics.
• Calibration of diamond-turning machines for optical component fabrication.

Precision Machining

• Geometric error compensation in CNC machines and 5-axis milling systems.
• Straightness and angular error mapping for machine tool guideways.

Research & Development

• Characterization of nanopositioning stages (e.g., piezoelectric or voice coil actuators).
• Alignment of large-scale systems like space telescopes or synchrotron beamlines.

4. Competitive Advantages

• Long-Term Stability: HeNe laser offers superior drift performance compared to diode lasers.
• Environmental Robustness: On-the-fly air compensation reduces reliance on controlled lab environments.
• Modular Design: Flexible configurations for diverse applications (displacement, angle, flatness, etc.).

Comparison with Competitors

• Keysight 5530: Similar accuracy, but ZMI-4104C excels in high-speed dynamic measurements.
• Renishaw XL-80: Compact and portable, but Zygo outperforms in long-range (>10 m) metrology.

5. Operational Notes

• Calibration: Requires periodic recalibration (recommended annually) using Zygo-certified references.
• Laser Lifetime: HeNe laser source typically lasts 50,000+ hours; replacement costs are significant.
• Data Analysis: Advanced signal processing tools (e.g., MATLAB, Python) may be needed for custom applications.